F09800 - SEMI F98 - Guide for Treatment of Reuse Water in Semiconductor Processing Revision:SEMI F98-0305 (Reapproved 1111) - Superseded The purpose of this Document

The purpose of this Document is to provide guidelines for organosilicate precursors used in Low K CVD processes and to standardize testing procedures to support those requirements

It does not define the messaging protocol

1  The scope of this Standard is grades and tiers of hydrochloric acid used in the semiconductor industry

This Specification defines the classes

and Rest of World

F09800 - SEMI F98 - Guide for Treatment of Reuse Water in Semiconductor Processing Revision:SEMI F98-0305 (Reapproved 1111) - Superseded The purpose of this Document* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1