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This Specification may be applied to manufacturing process
and survey available metrology tools
previously published September 2006
Standard events that document recipe execution in the process module or process area guarantee the availability of such context information
orgで入手可能となる。初版は1995年発行。前版は2006年11月発行。
E04800 - SEMI E48 - Specification for SMIF Indexer Volume Requirement StdTpc-FPD Metrology This Specification may be appliedNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to provide the volume required within a tool that enables integration of SMIF into tools with single or multiple ports. This Specification defines the space necessary within a tool with
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