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F04600 - SEMI F46 - StdTpc-Photovoltaic SEMI G63-95 (first published)

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Description

SEMI G63-95 (first published)

本安全指導方針適用於與前開式晶圓傳送盒(FOUP)、標準機械介面(SMIF)傳送盒連接之承載埠與晶圓匣,及此類將整合至半導體生產設備者。

SEMI E138 — Specification for XML Semiconductor Common Components

3  Test Method C — Digital oscilloscope recording (DOR) method

「アップセット反応」状態。これを決定するのは部品が吸収し,受領後の露出中にその後放散した水分量である。

F04600 - SEMI F46 - StdTpc-Photovoltaic SEMI G63-95 (first published)This guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on April 15, 1999. Initially available on www. semi. org August 1999; to be published September 1999. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been

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