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lifetimes measured by the SPV method are often shorter than the lifetimes measured by the PCD method because the photoconductivity can contain contributions from majority as well as minority carriers
SEMI E173-0415 (first published)
SEMI C16 — Guide for Precision Reporting/Data Traceability
SEMI E121 — Guide for Styleand Usage of XML for Semiconductor Manufacturing Applications
This Test Method does not cover acquisition of the height data array
E02700 - SEMI E27 - マスフローコントローラおよびマスフローメータの直線性のガイド Revision:SEMI E27-0611 - Superseded lifetimes measured by the SPVglobal Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org1992200411 (MFC) Referenced SEMI Standards None.
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