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SEMI MF673¾ Test Method for Measuring Resistivity of Semiconductor Wafers or Sheet Resistance of Semiconductor Films with a Noncontact Eddy Current Gauge
and affected substrates
The pressure drops for integral housing/cartridge combination units are determined as a single set of values
or extrapolate from
SEMI MF2074-0912 (technical revision)
F00100 - SEMI F1 - Specification for Leak Integrity of High-Purity Gas Piping Systems and Components Revision:SEMI F1-0812 - Superseded SEMI MF673¾ Test Method forThis Specification defines the leak testing requirements and leakage rates for high purity gas piping systems and components used in semiconductor manufacturing. It is also intended as an aid in the procurement and installation of equipment, materials, and services. This Specification applies to high purity gas piping systems and components used in semiconductor manufacturing facilities and comparable research and development areas. It includes